3D Micro Milling
Although conventional chemical or plasma etching
techniques yield high-quality results, they are
often slow and complicated, and provide
limited options for the geometries they
can produce. In addition, in photonic
applications in which sensitive optical
devices are integrated onto silicon
wafers, etching is often not
possible or recommended.
Short-pulsed UV lasers
provide fast and flexible
alternatives for creating
a wide range of 3D features.